Chemical Vapor Deposition of Tungsten and Tungsten Silicides - download pdf or read online

By John E. J. Schmitz

ISBN-10: 0815512880

ISBN-13: 9780815512882

This monograph condenses the suitable and pertinent literature on blanket and selective CVD of tungsten (W) right into a unmarried practicable quantity. The e-book provides the reader with the required heritage to raise, advantageous music, and effectively preserve a CVD-W method in a construction set-up. fabrics deposition chemistry, apparatus, strategy expertise, advancements, and functions are described.

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Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology) by John E. J. Schmitz


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